DYNAX 65AX-089 Wafer Transfer Robot Set, 320mm Module

Robot Arm Span:320mm

Maximum Load Capacity:Up to 5kg

Operating Speed:Variable, up to 1200mm/s

Precision Positioning:±0.05mm

Power Supply:230V AC, 50/60Hz

Control System:EtherCAT

Communication Protocol:Modbus TCP/IP

Robot Weight:Approximately 120kg

Environmental Conditions:Temperature: 0°C to 40°C, Humidity: 10% to 80% RH

    The Dynax 65AX-089 Wafer Transfer Robot Set 320mm is meticulously engineered for unparalleled performance in semiconductor manufacturing. Its advanced design ensures smooth operation within a wide temperature range, from -10°C to +50°C, guaranteeing reliability under various industrial conditions.

    With an impressive precision of ±0.02mm, this robot set is capable of handling delicate wafer transfers with utmost care, minimizing the risk of damage and ensuring the integrity of the manufacturing process.

    Equipped with a robust arm length of 650mm and a weight capacity of up to 1kg, it caters to a broad spectrum of material handling needs, from small wafers to slightly larger components.

    The integrated communication interface, supporting both RS232 and Ethernet protocols, facilitates seamless integration with existing factory systems, enhancing workflow efficiency and data transfer capabilities.

    Safety is a top priority with the inclusion of emergency stop mechanisms and advanced overload protection systems, safeguarding operators and equipment against potential hazards, ensuring a safe working environment.